洁净度级别悬浮粒子最大允许数/立方米静态动态(3)≥0.5μm≥5.0μm(2)≥0.5μm≥5.0μmA级(1)352020352020B级3520293520002900C级3520002900352000029000D级352000029000不作规定不作规定